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LPCVD存在問題及解決措施-行業數據

LPCVD存在問題及解決措施
LPCVD存在問題及解決措施
缺點：有較為嚴重的繞鍍問題，原位摻雜難，成膜速率低，通常需二次磷擴，能耗大，石英耗材成本較高，不同尺寸硅片兼容性差。
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所屬報告： 捷佳偉創-公司研究報告-光伏領域三線布局助力設備龍頭業績長虹-240103（42頁）.pdf
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