三個皮匠報告
政策庫
new
付費
搜索

集體晶粒到晶圓鍵合（Co-D2W）鍵合工藝流程-行業數據

集體晶粒到晶圓鍵合（Co-D2W）鍵合工藝流程
集體晶粒到晶圓鍵合（Co-D2W）鍵合工藝流程
集體晶粒到晶圓鍵合（Co-D2W）：在 Co-D2W 中，多個裸片在一個工藝步驟中被轉移到最終晶片上。Co-D2W 鍵合工藝的生產流程如下圖所示，包括四個主要部分：載體準備、載體群、晶片鍵合（臨時和永久）和載體分離。過去幾年中，Co-D2W在硅光通信等應用領域中進行了小批量量產。
其它 下載Excel 下載圖片 原圖定位
圖片屬性
圖片格式：PNG 圖片大?。?41KB 圖片尺寸：2333*850
同報告圖片
 / 82
集體晶粒到晶圓鍵合（Co-D2W）鍵合工藝流程_第1頁
fCDmraXpqqQgfCDmj4/ov7AgfAp8IC0tLSB8IC0tLSB8CnwgVHJhbnNmZXIgQ2FycmllciBQcmVwYXJhdGlvbiB8IOeOu+eSg+aIluehheWfuui9veeJh++8iOaXoOWbvuahiOaIluWvuem9kOagh+iusO+8iSB8CnwgQ2FycmllciBQb3B1bGF0aW9uIHwg6L2954mH5LiO57KY5ZCI5bGCIHwKfCBXYWZlci10by1XYWZlciBCb25kaW5nIHwgRDJX6ZSu5ZCIIHwKfCBDYXJyaWVyIFNlcGFyYXRpb24gfCDooajpnaLmuIXmtIEgfAoK6LWE5paZ5p2l5rqQ77yaRVZH5a6Y572R77yM5pa55q2j6K+B5Yi456CU56m25omA
集體晶粒到晶圓鍵合（Co-D2W）鍵合工藝流程_第2頁
fCDlubTku70gfCDlop7pgJ8gfAp8IC0tLSB8IC0tLSB8CnwgMjAyMCB8IDQlIHwKfCAyMDIxIHwgNSUgfAp8IDIwMjIgfCA0JSB8CnwgMjAyMyB8IC02JSB8CnwgMjAyNEUgfCAyJSB8CgrotYTmlpnmnaXmupDvvJpUcmVuZEZvcmNl77yM5pa55q2j6K+B5Yi456CU56m25omA
集體晶粒到晶圓鍵合（Co-D2W）鍵合工藝流程_第3頁
集體晶粒到晶圓鍵合（Co-D2W）鍵合工藝流程_第4頁
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
集體晶粒到晶圓鍵合（Co-D2W）鍵合工藝流程_第5頁
集體晶粒到晶圓鍵合（Co-D2W）鍵合工藝流程_第6頁
集體晶粒到晶圓鍵合（Co-D2W）鍵合工藝流程_第7頁
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
集體晶粒到晶圓鍵合（Co-D2W）鍵合工藝流程_第8頁
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
集體晶粒到晶圓鍵合（Co-D2W）鍵合工藝流程_第9頁
集體晶粒到晶圓鍵合（Co-D2W）鍵合工藝流程_第10頁
fCDlrqLmiLcgfCDljaDmr5QgfAp8IC0tLSB8IC0tLSB8Cnwg6Iux5Lyf6L6+IHwgNTkuNiUgfAp8IEFNRCB8IDEyLjklIHwKfCBIYWJhbmEgfCAxLjMlIHwKfCDosLfmrYwgfCAxNy4yJSB8Cnwg54m55pav5ouJIHwgMC4yJSB8CnwgQVdTIHwgMy4xJSB8Cnwg5b6u6L2vIHwgNS43JSB8Cnwg5Lit5Zu95Y6C5ZWGIHwgMC4xJSB8CgrotYTmlpnmnaXmupDvvJrmlrnmraPor4HliLjnoJTnqbbmiYDmlbTnkIbmtYvnrpc=
集體晶粒到晶圓鍵合（Co-D2W）鍵合工藝流程_第11頁
fCDlrqLmiLcgfCDljaDmr5QgfAp8IC0tLSB8IC0tLSB8Cnwg6Iux5Lyf6L6+IHwgNTguMiUgfAp8IEFNRCB8IDguMyUgfAp8IEhhYmFuYSB8IDEuNSUgfAp8IOiwt+atjCB8IDIxLjklIHwKfCDnibnmlq/mi4kgfCAwLjMlIHwKfCBBV1MgfCAyLjklIHwKfCDlvq7ova8gfCA2LjglIHwKfCDkuK3lm73ljoLllYYgfCAwLjElIHwKCui1hOaWmeadpea6kO+8muaWueato+ivgeWIuOeglOeptuaJgOaVtOeQhua1i+eulw==
集體晶粒到晶圓鍵合（Co-D2W）鍵合工藝流程_第12頁
fCDlrqLmiLcgfCDluILlnLrlrrnph4/ljaDmr5QgfAp8IC0tLSB8IC0tLSB8Cnwg6Iux5Lyf6L6+IHwgNjAuOSUgfAp8IEFNRCB8IDExLjYlIHwKfCBIYWJhbmEgfCAxLjQlIHwKfCDosLfmrYwgfCAxNi4zJSB8Cnwg54m55pav5ouJIHwgMC4yJSB8CnwgQVdTIHwgMy4xJSB8Cnwg5b6u6L2vIHwgNi4zJSB8Cnwg5Lit5Zu95Y6C5ZWGIHwgMC4xJSB8CgrotYTmlpnmnaXmupDvvJrmlrnmraPor4HliLjnoJTnqbbmiYDmlbTnkIbmtYvnrpc=
集體晶粒到晶圓鍵合（Co-D2W）鍵合工藝流程_第13頁
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
集體晶粒到晶圓鍵合（Co-D2W）鍵合工藝流程_第14頁
集體晶粒到晶圓鍵合（Co-D2W）鍵合工藝流程_第15頁
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
集體晶粒到晶圓鍵合（Co-D2W）鍵合工藝流程_第16頁
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
集體晶粒到晶圓鍵合（Co-D2W）鍵合工藝流程_第17頁
集體晶粒到晶圓鍵合（Co-D2W）鍵合工藝流程_第18頁
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
集體晶粒到晶圓鍵合（Co-D2W）鍵合工藝流程_第19頁
集體晶粒到晶圓鍵合（Co-D2W）鍵合工藝流程_第20頁
集體晶粒到晶圓鍵合（Co-D2W）鍵合工藝流程_第21頁
集體晶粒到晶圓鍵合（Co-D2W）鍵合工藝流程_第22頁
集體晶粒到晶圓鍵合（Co-D2W）鍵合工藝流程_第23頁
集體晶粒到晶圓鍵合（Co-D2W）鍵合工藝流程_第24頁
集體晶粒到晶圓鍵合（Co-D2W）鍵合工藝流程_第25頁
集體晶粒到晶圓鍵合（Co-D2W）鍵合工藝流程_第26頁
集體晶粒到晶圓鍵合（Co-D2W）鍵合工藝流程_第27頁
fCDmiJDmnKzpobkgICAgICAgfCDnmb7liIbmr5QgfAp8LS0tLS0tLS0tLS0tLS18LS0tLS0tLS18CnwgVFNWIOWIm+W7uiAgICAgfCAxOCUgICAgfAp8IFRTViDmmL7pnLIgICAgIHwgMTIlICAgIHwKfCDliY3mrrXliLbnqIsgICAgIHwgMjAlICAgIHwKfCDlkI7mrrXliLbnqIsgICAgIHwgMTUlICAgIHwKfCDnu4Too4UgICAgICAgICB8IDIwJSAgICB8Cnwg5rWL6K+VICAgICAgICAgfCAzJSAgICAgfAp8IOWIm+W7ulRTVuaXtuaNn+WksSB8IDclICAgICB8Cnwg57uE6KOF5pe25o2f5aSxICAgfCA0JSAgICAgfAoK6LWE5paZ5p2l5rqQ77yaM0RJbkNpdGVz77yM5pa55q2j6K+B5Yi456CU56m25omA
集體晶粒到晶圓鍵合（Co-D2W）鍵合工藝流程_第28頁
fCDpobnnm64gICAgICAgICB8IOeZvuWIhuavlCB8CnwtLS0tLS0tLS0tLS0tLXwtLS0tLS0tLXwKfCBUU1Yg5Yib5bu6ICAgICB8IDE3JSAgICB8CnwgVFNWIOaYvumcsiAgICAgfCAxMSUgICAgfAp8IOWJjeauteWItueoiyAgICAgfCAxOSUgICAgfAp8IOWQjuauteWItueoiyAgICAgfCAxNSUgICAgfAp8IOe7hOijhSAgICAgICAgIHwgMTklICAgIHwKfCDmmbblnIblh7jngrkgICAgIHwgMyUgICAgIHwKfCDmtYvor5UgICAgICAgICB8IDclICAgICB8Cnwg5Yib5bu6VFNW5pe25o2f5aSxIHwgOCUgICAgIHwKfCDnu4Too4Xml7bmjZ/lpLEgICB8IDElICAgICB8CgrotYTmlpnmnaXmupDvvJozREluQ2l0ZXPvvIzmlrnmraPor4HliLjnoJTnqbbmiYA=
集體晶粒到晶圓鍵合（Co-D2W）鍵合工藝流程_第29頁
集體晶粒到晶圓鍵合（Co-D2W）鍵合工藝流程_第30頁
fCDlubTku70gfCBOaSAo55m+5LiH576O5YWDKSB8IFNuQWcvU24gKOeZvuS4h+e+juWFgykgfCBDdSBBZHYgUGtnICjnmb7kuIfnvo7lhYMpIHwgQ3UgSW50ZXJjb25uZWN0cyAo55m+5LiH576O5YWDKSB8IOaAu+WinumVvyBZL1kgKCUpIHwKfC0tLS0tLXwtLS0tLS0tLS0tLS0tLS0tfC0tLS0tLS0tLS0tLS0tLS0tLS0tLXwtLS0tLS0tLS0tLS0tLS0tLS0tLS0tLXwtLS0tLS0tLS0tLS0tLS0tLS0tLS0tLS0tLS0tLXwtLS0tLS0tLS0tLS0tLS0tfAp8IDIwMjEgfCAxNDAgICAgICAgICAgICB8IDUwICAgICAgICAgICAgICAgICAgfCAzMCAgICAgICAgICAgICAgICAgICAgfCAxMjAgICAgICAgICAgICAgICAgICAgICAgICAgfCAxOCAgICAgICAgICAgICB8CnwgMjAyMiB8IDEyMCAgICAgICAgICAgIHwgNDAgICAgICAgICAgICAgICAgICB8IDI1ICAgICAgICAgICAgICAgICAgICB8IDExMCAgICAgICAgICAgICAgICAgICAgICAgICB8IDE2ICAgICAgICAgICAgIHwKfCAyMDIzIHwgMTAwICAgICAgICAgICAgfCAzMCAgICAgICAgICAgICAgICAgIHwgMjAgICAgICAgICAgICAgICAgICAgIHwgMTAwICAgICAgICAgICAgICAgICAgICAgICAgIHwgMTQgICAgICAgICAgICAgfAp8IDIwMjQgfCAxMTAgICAgICAgICAgICB8IDM1ICAgICAgICAgICAgICAgICAgfCAyNSAgICAgICAgICAgICAgICAgICAgfCAxMDUgICAgICAgICAgICAgICAgICAgICAgICAgfCAxMiAgICAgICAgICAgICB8CnwgMjAyNSB8IDExMCAgICAgICAgICAgIHwgMzUgICAgICAgICAgICAgICAgICB8IDI1ICAgICAgICAgICAgICAgICAgICB8IDEwNSAgICAgICAgICAgICAgICAgICAgICAgICB8IDEwICAgICAgICAgICAgIHwKfCAyMDI2IHwgMTEwICAgICAgICAgICAgfCAzNSAgICAgICAgICAgICAgICAgIHwgMjUgICAgICAgICAgICAgICAgICAgIHwgMTA1ICAgICAgICAgICAgICAgICAgICAgICAgIHwgOCAgICAgICAgICAgICAgfAoK6LWE5paZ5p2l5rqQ77yaVEVDSENFVO+8jOaWueato+ivgeWIuOeglOeptuaJgA==
集體晶粒到晶圓鍵合（Co-D2W）鍵合工藝流程_第31頁
fCBDdSBTZWVkIHwgU2kgV2FmZXIgLyBCYXJyaWVyIExheWVyIHwgVW5zdGFibGUgdmlhIGZpbGxpbmcgcHJvY2VzcyB8IFN0YWJsZSBwcm9jZXNzIHwKfCAtLS0gfCAtLS0gfCAtLS0gfCAtLS0gfAp8IC0gfCAtIHwgLSB8IC0gfAp8IC0gfCAtIHwgLSB8IC0gfAp8IC0gfCAtIHwgLSB8IC0gfAp8IC0gfCAtIHwgLSB8IC0gfAoK6LWE5paZ5p2l5rqQ77ya5p2c6YKm77yM5pa55q2j6K+B5Yi456CU56m25omA
集體晶粒到晶圓鍵合（Co-D2W）鍵合工藝流程_第32頁
集體晶粒到晶圓鍵合（Co-D2W）鍵合工藝流程_第33頁
fCBTdHJ1Y3R1cmUgfCBTblBiIEM0IEJ1bXAgfCBQYi1GcmVlIEM0IEJ1bXAgfCBDdSBQaWxsYXIgKyBQYi1mcmVlIENhcCB8IEN1IM68LVBpbGxhciArIFBiLWZyZWUgQ2FwIHwKfC0tLS0tLS0tLS0tfC0tLS0tLS0tLS0tLS0tfC0tLS0tLS0tLS0tLS0tLS0tfC0tLS0tLS0tLS0tLS0tLS0tLS0tLS0tLS18LS0tLS0tLS0tLS0tLS0tLS0tLS0tLS0tLS18CnwgRGlhbWV0ZXIgIHwgNzUg4oCTIDIwMCDCtW0gIHwgNzUg4oCTIDE1MCDCtW0gICAgfCA1MCDigJMgMTAwIMK1bSAgICAgICAgICAgICB8IDEwIOKAkyAzMCDCtW0gICAgICAgICAgICAgICB8CgrotYTmlpnmnaXmupDvvJrpmbbmsI/ljJblrabvvIzmlrnmraPor4HliLjnoJTnqbbmiYA=
集體晶粒到晶圓鍵合（Co-D2W）鍵合工藝流程_第34頁
集體晶粒到晶圓鍵合（Co-D2W）鍵合工藝流程_第35頁
集體晶粒到晶圓鍵合（Co-D2W）鍵合工藝流程_第36頁
集體晶粒到晶圓鍵合（Co-D2W）鍵合工藝流程_第37頁
集體晶粒到晶圓鍵合（Co-D2W）鍵合工藝流程_第38頁
集體晶粒到晶圓鍵合（Co-D2W）鍵合工藝流程_第39頁
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
集體晶粒到晶圓鍵合（Co-D2W）鍵合工藝流程_第40頁
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
集體晶粒到晶圓鍵合（Co-D2W）鍵合工藝流程_第41頁
集體晶粒到晶圓鍵合（Co-D2W）鍵合工藝流程_第42頁
集體晶粒到晶圓鍵合（Co-D2W）鍵合工藝流程_第43頁
集體晶粒到晶圓鍵合（Co-D2W）鍵合工藝流程_第44頁
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
集體晶粒到晶圓鍵合（Co-D2W）鍵合工藝流程_第45頁
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
集體晶粒到晶圓鍵合（Co-D2W）鍵合工藝流程_第46頁
fCDmraXpqqQgfCDmj4/ov7AgfAp8IC0tLSB8IC0tLSB8CnwgVHJhbnNmZXIgQ2FycmllciBQcmVwYXJhdGlvbiB8IOeOu+eSg+aIluehheWfuui9veeJh++8iOaXoOWbvuahiOaIluWvuem9kOagh+iusO+8iSB8CnwgQ2FycmllciBQb3B1bGF0aW9uIHwg6L2954mH5LiO57KY5ZCI5bGCIHwKfCBXYWZlci10by1XYWZlciBCb25kaW5nIHwgRDJX6ZSu5ZCIIHwKfCBDYXJyaWVyIFNlcGFyYXRpb24gfCDooajpnaLmuIXmtIEgfAoK6LWE5paZ5p2l5rqQ77yaRVZH5a6Y572R77yM5pa55q2j6K+B5Yi456CU56m25omA
集體晶粒到晶圓鍵合（Co-D2W）鍵合工藝流程_第47頁
fCDmraXpqqQgfCDmj4/ov7AgfAp8IC0tLSB8IC0tLSB8CnwgQ2xlYW5pbmcgQ2FycmllciBQb3B1bGF0aW9uIHwgRmlsbSBGcmFtZSB3aXRoIFNpbmd1bGF0ZWQgRGllcywgUmUtUG9wdWxhdGlvbiBvbiBDYXJyaWVyIGZvciBDbGVhbmluZyB8CnwgRGllIENsZWFuIGFuZCBBY3RpdmF0aW9uIHwgUGxhc21hIEFjdGl2YXRpb24gSGFuZGxlciwgQ2xlYW5pbmcgSGFuZGxlciB8CnwgRGlyZWN0IFBsYWNlbWVudCBGbGlwIENoaXAgfCBUcmFuc3BvcnQgQ2FycmllciwgSGlnaCBQcmVjaXNpb24gRDJXIEJvbmRpbmcgfAoK6LWE5paZ5p2l5rqQ77yaRVZH5a6Y572R77yM5pa55q2j6K+B5Yi456CU56m25omA
集體晶粒到晶圓鍵合（Co-D2W）鍵合工藝流程_第48頁
集體晶粒到晶圓鍵合（Co-D2W）鍵合工藝流程_第49頁
fCDlubTku70gfCBBTUQg5Lqn5ZOBIHwg5omA6ZyA5Zu65pm25q2l6aqkIHwg5Zu65pm25oqA5pyvIHwgQmVzaSDorr7lpIflnovlj7cgfCDorr7lpIfljZXku7fvvIjkuIfnvo7lhYPvvIkgfCBVUEggfAp8IC0tLSB8IC0tLSB8IC0tLSB8IC0tLSB8IC0tLSB8IC0tLSB8IC0tLSB8CnwgMjAxNyB8IOesrOS4gOS7oyBHRU4gRVBZQyB8IDQgfCDlgJLoo4UgfCA4ODAwIEZDIFF1YW50dW0gfCA1MCB8IH45MDAwIHwKfCAyMDE5IHwg56ys5LqM5LujIEdFTiBFUFlDIHwgOSB8IOWAkuijhSB8IDg4MDAgRkMgUXVhbnR1bSB8IDUwIHwgfjkwMDAgfAp8IDIwMjMgfCDnrKzlm5vku6MgR0VOIEVQWUMgfCA+NTAgfCDmt7flkIjplK7lkIggKyDlgJLoo4UgfCA4ODAwIFVsdHJhIHwgMTUwLTI1MCB8IH4xNTAwLTIwMDAgfAoK6LWE5paZ5p2l5rqQ77yaQmVzaSDlrpjnvZHvvIzmlrnmraPor4HliLjnoJTnqbbmiYA=
集體晶粒到晶圓鍵合（Co-D2W）鍵合工藝流程_第50頁
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
集體晶粒到晶圓鍵合（Co-D2W）鍵合工藝流程_第51頁
fCDlubTku70gfCDkuInmmJ8gfCBTSyDmtbflipvlo6sgfCDnvo7lhYkgfCDljY7pgqbnlLUgfCDlipvnp6/nlLUgfCDljZfkuprnp5EgfCDotYTmnKzlvIDmlK/lkIjorqEgKOeZvuS4h+e+juWFgykgfAp8LS0tLS0tfC0tLS0tLXwtLS0tLS0tLS0tLS18LS0tLS0tfC0tLS0tLS0tfC0tLS0tLS0tfC0tLS0tLS0tfC0tLS0tLS0tLS0tLS0tLS0tLS0tLS0tLS0tfAp8IDIwMjIgfCAxMSwwMDAgfCA4LDAwMCAgICAgIHwgNSwwMDAgfCAyLDAwMCAgfCAxLDAwMCAgfCA1MDAgICAgIHwgMjgsNTAwICAgICAgICAgICAgICAgICAgIHwKfCAyMDIzIHwgOSwwMDAgIHwgNywwMDAgICAgICB8IDQsMDAwIHwgMSw1MDAgIHwgMSwwMDAgIHwgNTAwICAgICB8IDIzLDAwMCAgICAgICAgICAgICAgICAgICB8CnwgMjAyNEZ8IDEwLDAwMCB8IDgsMDAwICAgICAgfCA1LDAwMCB8IDIsMDAwICB8IDEsNTAwICB8IDUwMCAgICAgfCAyNywwMDAgICAgICAgICAgICAgICAgICAgfAoK6LWE5paZ5p2l5rqQ77yaVHJlbmRGb3JjZe+8jOaWueato+ivgeWIuOeglOeptuaJgA==
集體晶粒到晶圓鍵合（Co-D2W）鍵合工藝流程_第52頁
集體晶粒到晶圓鍵合（Co-D2W）鍵合工藝流程_第53頁
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
集體晶粒到晶圓鍵合（Co-D2W）鍵合工藝流程_第54頁
集體晶粒到晶圓鍵合（Co-D2W）鍵合工藝流程_第55頁
集體晶粒到晶圓鍵合（Co-D2W）鍵合工藝流程_第56頁
集體晶粒到晶圓鍵合（Co-D2W）鍵合工藝流程_第57頁
集體晶粒到晶圓鍵合（Co-D2W）鍵合工藝流程_第58頁
fCDlubTku70gfCDlsIHoo4Xorr7lpIcgfCDmtYvor5Xorr7lpIcgfCDmmbblnIbliLbpgKDorr7lpIcgfAp8LS0tLS0tfC0tLS0tLS0tLS18LS0tLS0tLS0tLXwtLS0tLS0tLS0tLS0tLXwKfCAyMDIyIHwgNzUuMiAgICAgfCA5NDEgICAgICB8IDU3LjggICAgICAgICB8CnwgMjAyM0Z8IDYzLjIgICAgIHwgOTA1LjkgICAgfCAzOS45ICAgICAgICAgfAp8IDIwMjRGfCA3MiAgICAgICB8IDkzMS42ICAgIHwgNDkuNSAgICAgICAgIHwKfCAyMDI1RnwgODQuMiAgICAgfCAxMDk3LjYgICB8IDU5LjUgICAgICAgICB8CgrotYTmlpnmnaXmupDvvJpTRU1J77yM5pa55q2j6K+B5Yi456CU56m25omA
集體晶粒到晶圓鍵合（Co-D2W）鍵合工藝流程_第59頁
fCDlubTku70gfCDku6Plt6Uv6YC76L6RIHwgTkFORCB8IERSQU0gfCDlhbbku5YgfAp8LS0tLS0tfC0tLS0tLS0tLS18LS0tLS0tfC0tLS0tLXwtLS0tLS18CnwgMjAyMiB8IDUwMCAgICAgIHwgMjAwICB8IDEwMCAgfCAxMDAgIHwKfCAyMDIzRnwgNTUwICAgICAgfCAyNTAgIHwgMTUwICB8IDEwMCAgfAp8IDIwMjRGfCA2MDAgICAgICB8IDMwMCAgfCAyMDAgIHwgMTAwICB8CnwgMjAyNUZ8IDY1MCAgICAgIHwgMzUwICB8IDI1MCAgfCAxMDAgIHwKCui1hOaWmeadpea6kO+8mlNFTUnvvIzmlrnmraPor4HliLjnoJTnqbbmiYA=
集體晶粒到晶圓鍵合（Co-D2W）鍵合工藝流程_第60頁
fCDlubTku70gfCDkuK3lm73lpKfpmYYgfCDkuK3lm73lj7Dmub4gfCDljJfnvo4gfCDml6XmnKwgfCDmrKfmtLIgfCDpn6nlm70gfCDlhbbku5YgfCDmgLvorqEgfCDkuK3lm73lpKfpmYbljaDmr5QgfAp8LS0tLS0tfC0tLS0tLS0tLS18LS0tLS0tLS0tLXwtLS0tLS18LS0tLS0tfC0tLS0tLXwtLS0tLS18LS0tLS0tfC0tLS0tLXwtLS0tLS0tLS0tfAp8IDIwMDUgfCA0LjAlICAgICB8IDUuNyUgICAgIHwgNi44JSB8IDYuNCUgfCA1LjglIHwgOS4yJSB8IDguNCUgfCA2LjclIHwgMTAuNiUgICAgfAp8IDIwMDYgfCA1LjclICAgICB8IDYuOCUgICAgIHwgNi40JSB8IDUuOCUgfCA5LjIlIHwgOC40JSB8IDYuNyUgfCAxMC42JSB8IDExLjclICAgIHwKfCAyMDA3IHwgNi44JSAgICAgfCA2LjQlICAgICB8IDUuOCUgfCA5LjIlIHwgOC40JSB8IDYuNyUgfCAxMC42JSB8IDExLjclIHwgMTMuNCUgICAgfAp8IDIwMDggfCA2LjQlICAgICB8IDUuOCUgICAgIHwgOS4yJSB8IDguNCUgfCA2LjclIHwgMTAuNiUgfCAxMS43JSB8IDEzLjQlIHwgMTQuNSUgICAgfAp8IDIwMDkgfCA1LjglICAgICB8IDkuMiUgICAgIHwgOC40JSB8IDYuNyUgfCAxMC42JSB8IDExLjclIHwgMTMuNCUgfCAxNC41JSB8IDIwLjMlICAgIHwKfCAyMDEwIHwgOS4yJSAgICAgfCA4LjQlICAgICB8IDYuNyUgfCAxMC42JSB8IDExLjclIHwgMTMuNCUgfCAxNC41JSB8IDIwLjMlIHwgMjIuNSUgICAgfAp8IDIwMTEgfCA4LjQlICAgICB8IDYuNyUgICAgIHwgMTAuNiUgfCAxMS43JSB8IDEzLjQlIHwgMTQuNSUgfCAyMC4zJSB8IDIyLjUlIHwgMjYuMyUgICAgfAp8IDIwMTIgfCA2LjclICAgICB8IDEwLjYlICAgIHwgMTEuNyUgfCAxMy40JSB8IDE0LjUlIHwgMjAuMyUgfCAyMi41JSB8IDI2LjMlIHwgMjguOSUgICAgfAp8IDIwMTMgfCAxMC42JSAgICB8IDExLjclICAgIHwgMTMuNCUgfCAxNC41JSB8IDIwLjMlIHwgMjIuNSUgfCAyNi4zJSB8IDI4LjklIHwgMjYuMyUgICAgfAp8IDIwMTQgfCAxMS43JSAgICB8IDEzLjQlICAgIHwgMTQuNSUgfCAyMC4zJSB8IDIyLjUlIHwgMjYuMyUgfCAyOC45JSB8IDI2LjMlIHwgMzQuNSUgICAgfAp8IDIwMTUgfCAxMy40JSAgICB8IDE0LjUlICAgIHwgMjAuMyUgfCAyMi41JSB8IDI2LjMlIHwgMjguOSUgfCAyNi4zJSB8IDM0LjUlIHwgNDAuMCUgICAgfAp8IDIwMTYgfCAxNC41JSAgICB8IDIwLjMlICAgIHwgMjIuNSUgfCAyNi4zJSB8IDI4LjklIHwgMjYuMyUgfCAzNC41JSB8IDQwLjAlIHwgMzUuMCUgICAgfAp8IDIwMTcgfCAyMC4zJSAgICB8IDIyLjUlICAgIHwgMjYuMyUgfCAyOC45JSB8IDI2LjMlIHwgMzQuNSUgfCA0MC4wJSB8IDM1LjAlIHwgMzAuMCUgICAgfAp8IDIwMTggfCAyMi41JSAgICB8IDI2LjMlICAgIHwgMjguOSUgfCAyNi4zJSB8IDM0LjUlIHwgNDAuMCUgfCAzNS4wJSB8IDMwLjAlIHwgMjUuMCUgICAgfAp8IDIwMTkgfCAyNi4zJSAgICB8IDI4LjklICAgIHwgMjYuMyUgfCAzNC41JSB8IDQwLjAlIHwgMzUuMCUgfCAzMC4wJSB8IDI1LjAlIHwgMjAuMCUgICAgfAp8IDIwMjAgfCAyOC45JSAgICB8IDI2LjMlICAgIHwgMzQuNSUgfCA0MC4wJSB8IDM1LjAlIHwgMzAuMCUgfCAyNQ==
集體晶粒到晶圓鍵合（Co-D2W）鍵合工藝流程_第61頁
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
集體晶粒到晶圓鍵合（Co-D2W）鍵合工藝流程_第62頁
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
集體晶粒到晶圓鍵合（Co-D2W）鍵合工藝流程_第63頁
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
集體晶粒到晶圓鍵合（Co-D2W）鍵合工藝流程_第64頁
集體晶粒到晶圓鍵合（Co-D2W）鍵合工藝流程_第65頁
集體晶粒到晶圓鍵合（Co-D2W）鍵合工藝流程_第66頁
集體晶粒到晶圓鍵合（Co-D2W）鍵合工藝流程_第67頁
集體晶粒到晶圓鍵合（Co-D2W）鍵合工藝流程_第68頁
集體晶粒到晶圓鍵合（Co-D2W）鍵合工藝流程_第69頁
集體晶粒到晶圓鍵合（Co-D2W）鍵合工藝流程_第70頁
集體晶粒到晶圓鍵合（Co-D2W）鍵合工藝流程_第71頁
集體晶粒到晶圓鍵合（Co-D2W）鍵合工藝流程_第72頁
集體晶粒到晶圓鍵合（Co-D2W）鍵合工藝流程_第73頁
集體晶粒到晶圓鍵合（Co-D2W）鍵合工藝流程_第74頁
集體晶粒到晶圓鍵合（Co-D2W）鍵合工藝流程_第75頁
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
集體晶粒到晶圓鍵合（Co-D2W）鍵合工藝流程_第76頁
fCDlhazlj7jlkI3np7AgfCAyMDIz5bm05Lq65Z2H5Yib5Yip77yI5LiH576O5YWD77yJIHwgMjAyMuW5tOS6uuWdh+WIm+WIqe+8iOS4h+e+juWFg++8iSB8CnwgLS0tIHwgLS0tIHwgLS0tIHwKfCDpmL/mlq/puqYgfCAxNC4xIHwgMjEuNCB8Cnwg5Lic5Lqs55S15a2QIHwgMTQuOCB8IDIyLjggfAp8IOenkeejiiB8IDE4LjAgfCAyNC44IHwKfCDms5vmnpfpm4blm6IgfCAyMC4xIHwgMjYuNyB8Cnwg5bqU55So5p2Q5paZIHwgMjEuMSB8IDE5LjUgfAoK6LWE5paZ5p2l5rqQ77yaV2luZO+8jOaWueato+ivgeWIuOeglOeptuaJgA==
集體晶粒到晶圓鍵合（Co-D2W）鍵合工藝流程_第77頁
集體晶粒到晶圓鍵合（Co-D2W）鍵合工藝流程_第78頁
集體晶粒到晶圓鍵合（Co-D2W）鍵合工藝流程_第79頁
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
集體晶粒到晶圓鍵合（Co-D2W）鍵合工藝流程_第80頁
集體晶粒到晶圓鍵合（Co-D2W）鍵合工藝流程_第81頁
集體晶粒到晶圓鍵合（Co-D2W）鍵合工藝流程_第82頁
集體晶粒到晶圓鍵合（Co-D2W）鍵合工藝流程_第83頁
fCBNZW1vcnkgQ2FwYWNpdHkgfCBIMTAwIFNYTTUgfCBNSTMwMFggT0FNIHwKfC0tLS0tLS0tLS0tLS0tLS0tfC0tLS0tLS0tLS0tfC0tLS0tLS0tLS0tLXwKfCBNZW1vcnkgQ2FwYWNpdHkgKEdCKSB8IDgwICAgICAgICB8IDE5MiAgICAgICAgfAp8IE1lbW9yeSBCYW5kd2lkdGggKFRCL3MpIHwgMy40ICAgICAgIHwgNS4zICAgICAgICB8CgrotYTmlpnmnaXmupDvvJpBTUTvvIzmlrnmraPor4HliLjnoJTnqbbmiYA=
所屬報告： 電子行業專題報告：看好國產存儲供應鏈機遇~設備篇-240707（46頁）.pdf
打包全文圖表

相關數據

最新數據
聯系我們
  • 0731-84720580
  • sgpjbg002
  • 工作日 9:30 - 18:00
關于我們
侵權處理
關于我們

三個皮匠報告專業的行業報告下載站，每日更新，歡迎大家關注！

copyright@2008-2013 長沙景略智創信息技術有限公司版權所有
網站備案/許可證號：湘B2-20190120

客服
商務合作
小程序
服務號
折疊
午夜网日韩中文字幕,日韩Av中文字幕久久,亚洲中文字幕在线一区二区,最新中文字幕在线视频网站