硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)-行業數據

硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)
圖片屬性
圖片格式:PNG 圖片大?。?143KB 圖片尺寸:3757*740
同報告圖片
 / 111
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第1頁
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
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第2頁
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第3頁
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
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第4頁
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第5頁
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第6頁
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第7頁
fCBMZWFkaW5nLUVkZ2UgMjAwRy9sYW5lIERTUCBQSFkgUG9ydGZvbGlvIHwKfC0tLS0tLS0tLS0tLS0tLS0tLS0tLS0tLS0tLXwKfCBmb3IgTmV4dC1HZW4gQUkgSW5mcmFzdHJ1Y3R1cmUgICAgICAgICAgfAp8ICoqU2lhbjMqKiAgICAgICAgICAgICAgICAgfAp8IFNpbmdsZS1Nb2RlIFRyYW5zY2VpdmVycyAgfAp8ICoqU2lhbjJNKiogICAgICAgICAgICAgICAgfAp8IE11bHRpLU1vZGUgVHJhbnNjZWl2ZXJzICAgfAoKCui1hOaWmeadpea6kO+8muWFrOWPuOWumOe9ke+8jOWbveS/oeivgeWIuOe7j+a1jueglOeptuaJgOaVtOeQhg==
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第8頁
5Lul5LiL5piv5o+Q5Y+W55qE5pWw5o2u5bm255Sf5oiQ55qE6KGo5qC877yM5Lul5Y+K6LWE5paZ5p2l5rqQ77yaCgp8IOW5tOS7vSAgICAgICB8IOiQpeS4muaUtuWFpe+8iOS6v+WFg++8iSB8CnwtLS0tLS0tLS0tLS18LS0tLS0tLS0tLS0tLS0tLS0tfAp8IDIwMjEgICAgICAgfCAyLjc5ICAgICAgICAgICAgIHwKfCAyMDIyICAgICAgIHwgMi44NiAgICAgICAgICAgICB8CnwgMjAyMyAgICAgICB8IDMuODIgICAgICAgICAgICAgfAp8IDIwMjQgMS035pyIIHwgMS4yOCAgICAgICAgICAgICB8CgrotYTmlpnmnaXmupDvvJrlhazlj7jlrpjnvZHvvIzlm73kv6Hor4HliLjnu4/mtY7noJTnqbbmiYDmlbTnkIY=
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第9頁
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第10頁
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第11頁
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第12頁
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第13頁
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第14頁
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
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第15頁
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第16頁
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第17頁
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第18頁
fCDlm77lg48gfCDmj4/ov7AgfAp8LS0tLS0tfC0tLS0tLXwKfCDkuIrlm74gfCDkuInnu7TplKXlvaLmqKHmlpHovazljJblmaggfAp8IOS4i+WbviB8IOWPjemUpeW9ouS4remXtOazouWvvOiApuWQiOWZqCB8CgrotYTmlpnmnaXmupA6IFNvbiwgR3llb25naG8gZXQgYWwuIOOAikhpZ2gtZWZmaWNpZW5jeSBicm9hZGJhbmQgbGlnaHQgY291cGxpbmcgYmV0d2VlbiBvcHRpY2FsIGZpYmVycyBhbmQgbmFub3NjYWxlIHNpbGljb24gd2F2ZWd1aWRlc+OAiyJPcHRpY3MgRXhwcmVzcyIgMjAxNg==
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第19頁
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第20頁
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
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第21頁
fCDlubTku70gfCDlhYnpgJrkv6HmlLblj5HmqKHlnZfplIDph4/vvIjkuIflj6rvvIkgfAp8LS0tLS0tfC0tLS0tLS0tLS0tLS0tLS0tLS0tLS0tLS0tfAp8IDIwMjAgfCA4MjQgICAgICAgICAgICAgICAgICAgICAgfAp8IDIwMjEgfCAxMDQxICAgICAgICAgICAgICAgICAgICAgfAp8IDIwMjIgfCA5NDYgICAgICAgICAgICAgICAgICAgICAgfAp8IDIwMjMgfCA3NDUgICAgICAgICAgICAgICAgICAgICAgfAp8IDIwMjQgfCAxNDU5ICAgICAgICAgICAgICAgICAgICAgfAoK6LWE5paZ5p2l5rqQ77ya5YWs5Y+45YWs5ZGK77yM5Zu95L+h6K+B5Yi457uP5rWO56CU56m25omA5pW055CG
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第22頁
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
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第23頁
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第24頁
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
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第25頁
fCDph4/kuqfniYggNDAwRyBPU0ZQLUREIERSNCDnoYXlhYnmqKHlnZcgfCA0MDBHIERSNCDnoYXlhYnmqKHlnZcgfAp8LS0tLS0tLS0tLS0tLS0tLS0tLS0tLS0tLS0tfC0tLS0tLS0tLS0tLS0tLS0tLXw=
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第26頁
5Lul5LiL5piv5o+Q5Y+W55qE5pWw5o2u5bm255Sf5oiQ55qE6KGo5qC877yM5Lul5Y+K6LWE5paZ5p2l5rqQ77yaCgp8IOW5tOS7vSAgfCDlhYnoiq/niYflj4rlmajku7bplIDph4/vvIjnmb7kuIflj6rvvIkgfAp8LS0tLS0tLXwtLS0tLS0tLS0tLS0tLS0tLS0tLS0tLS0tLXwKfCAyMDIwICB8IDIyLjg5ICAgICAgICAgICAgICAgICAgICB8CnwgMjAyMSAgfCAzOS40NSAgICAgICAgICAgICAgICAgICAgfAp8IDIwMjIgIHwgMzkuNTYgICAgICAgICAgICAgICAgICAgIHwKfCAyMDIzICB8IDYwLjE5ICAgICAgICAgICAgICAgICAgICB8CnwgMjAyNCAgfCAxMDcuMTIgICAgICAgICAgICAgICAgICAgfAoK6LWE5paZ5p2l5rqQ77ya5YWs5Y+45YWs5ZGK77yM5Zu95L+h6K+B5Yi457uP5rWO56CU56m25omA5pW055CG
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第27頁
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
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第28頁
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
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第29頁
5Lul5LiL5piv5qC55o2u5Zu+54mH5L+h5oGv55Sf5oiQ55qE5pWw5o2u6KGo5qC877yaCgoKfCDkvKDnu5/lhYnmqKHlnZfvvIhJblDvvIkgfCDnoYXlhYnlrZDlrabvvIhTae+8iSB8CnwtLS0tLS0tLS0tLS0tLS0tLS18LS0tLS0tLS0tLS0tLS0tLXwKfCDnu4Too4Xpg6jku7bmlbAgICAgICAgfCA+NDAgICAgICAgICAgICB8Cnwg57uE6KOF6YOo5Lu25pWwICAgICAgIHwgNCAgICAgICAgICAgICAgfAoK6LWE5paZ5p2l5rqQ77yaQ1NETu+8jOWbveS/oeivgeWIuOe7j+a1jueglOeptuaJgOaVtOeQhg==
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第30頁
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
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第31頁
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
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第32頁
fCDlubTku70gfCDpkqLphbjplILosIPliLblmajlj4rlhYnlrZDpm4bmiJDkuqflk4Eo5Lu2KSB8CnwtLS0tLS18LS0tLS0tLS0tLS0tLS0tLS0tLS0tLS0tLS0tLS18CnwgMjAyMCB8IDQsMDY0ICAgICAgICAgICAgICAgICAgICAgICB8CnwgMjAyMSB8IDksOTU1ICAgICAgICAgICAgICAgICAgICAgICB8CnwgMjAyMiB8IDUsMDczICAgICAgICAgICAgICAgICAgICAgICB8CnwgMjAyMyB8IDQsNDc2ICAgICAgICAgICAgICAgICAgICAgICB8CgrotYTmlpnmnaXmupDvvJrlhazlj7jlhazlkYrvvIzlm73kv6Hor4HliLjnu4/mtY7noJTnqbbmiYDmlbTnkIY=
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第33頁
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
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第34頁
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第35頁
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第36頁
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第37頁
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第38頁
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
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第39頁
fCDlm74gfCDmlofmnKwgIHwKfC0tLS0tLXwtLS0tLS0tfAp8IOWbvjEgIHwg5YWJ57qk5LiO56GF5rOi5a+85bC65a+45aSx6YWN56S65oSP5Zu+IHwKCui1hOaWmeadpea6kO+8muOAikFycmF5ZWQgV2F2ZWd1aWRlIEdyYXRpbmdz44CL
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第40頁
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第41頁
fCDlubTku70gfCDlhbbku5YgfCDmjqXlhaXlkozmlbDmja4gfCDkvKDovpMgfCDlkIzmr5Tlop7pgJ8gfAp8LS0tLS0tfC0tLS0tLXwtLS0tLS0tLS0tfC0tLS0tLXwtLS0tLS0tLS0tfAp8IDIwMjAgfCA2MC40NiB8IDI0LjczICAgIHwgMzQuMzQgfCAgICAgICAgICB8CnwgMjAyMSB8IDY0Ljg2IHwgMjYuMDIgICAgfCAzOC40OCB8ICAgICAgICAgIHwKfCAyMDIyIHwgNjkuMTIgfCAzMi4xICAgICB8IDM2LjU3IHwgICAgICAgICAgfAp8IDIwMjMgfCA2MC42MSB8IDI2LjY0ICAgIHwgMzMuNDQgfCAgICAgICAgICB8CnwgMjAyNCB8IDgyLjcyIHwgNTEuMDEgICAgfCAzMS4wMiB8IDM2LjUlICAgIHwKCui1hOaWmeadpea6kO+8muWFrOWPuOWFrOWRiu+8jOWbveS/oeivgeWIuOe7j+a1jueglOeptuaJgOaVtOeQhg==
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第42頁
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
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第43頁
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
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第44頁
fCDml7bpl7TvvIjlubTku73vvIkgfCDkuovku7Yv5Lqn5ZOBIHwg5o+P6L+wIHwKfCAtLS0gfCAtLS0gfCAtLS0gfAp8IDE5ODcgfCDnoYXln7rlhYnnlLXmlYjlupTooqvlj5HnjrAgfCBTaVBoIHYwLjAgfAp8IDE5OTMgfCBSLiBTb3JlZuaPkOWHuuehheWfuuWFieeUteWtkOmbhuaIkOamguW/tSB8IOamguW/teWPiumqjOivgSB8CnwgMjAwMyB8IOW3qOWktOWPguS4ju+8iFNpUGggdjAuMe+8iSB8IOaAp+iDveaPkOWNhyB8CnwgMjAxMCB8IElCTSA0MEdiL3PmjqLmtYvlmaggfCDpm4bmiJAm5ZWG55SoIHwKfCAyMDEzIHwg5Lit56eR6ZKi56CUIDYwR2Ivc+iwg+WItuWZqCB8IOmbhuaIkCbllYbnlKggfAp8IDIwMTggfCBBY2FjaWEgNDAwR2IvcyBUYi9z5YWJ6Iqv54mH44CB5YWJ5Lyg5oSf44CB56GF5YWJ55u45bmy5pS25Y+R5ZmoIHwg5YWJ55S16J6N5ZCI6Iqv54mH5LiK57q/IHwKfCAyMDE5IHwgSW50ZWwgNDAwR2IvcyDnoYXlhYnmlLblj5HmqKHlnZcgfCDpq5jpm4bmiJDluqbjgIHpq5jluKblrr3jgIHkvY7miJDmnKwgfAp8IDIwMjMgfCA0MDBHK+aXtuS7o++8iFNpUGggdjIuMO+8iSB8IOazm+WcqOWMluW6lOeUqCB8CgrotYTmlpnmnaXmupDvvJrlm73lrrbkv6Hmga/lhYnnlLXnlLXlrZDliJvmlrDkuK3lv4PjgIrnoYXlhYnoiq/niYfvvJrkv6Hmga/lhYnnlLXlrZDkvb/og73mioDmnK/jgIvvvIzlm73kv6Hor4HliLjnu4/mtY7noJTnqbbmiYDmlbTnkIY=
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第45頁
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
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第46頁
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第47頁
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
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第48頁
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
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第49頁
fCDlsYIgICAgICAgfCDmnZDmlpkgICB8IOWOmuW6piAobm0pIHwKfC0tLS0tLS0tLS18LS0tLS0tLS18LS0tLS0tLS0tLS0tfAp8IHArLUdlICAgIHwgICAgICAgIHwgICAgICAgICAgICB8CnwgR2UgICAgICAgfCAgICAgICAgfCAgICAgICAgICAgIHwKfCBuKy1TaSAgICB8ICAgICAgICB8ICAgICAgICAgICAgfAp8IFNpT+KCgiAgICAgfCAgICAgICAgfCAgICAgICAgICAgIHwKfCBTaSBzdWJzdHJhdGUgfCAgICAgICAgfCAgICAgICAgICAgIHwKCui1hOaWmeadpea6kO+8muWImOaZuuetie+8jOOAiuehheWfuumUl1BJTuWFieeUteaOoua1i+WZqOeahOeglOeptui/m+WxleOAi++8jEouIOWNiuWvvOS9k+WFieeUtSwgMjAyMiwgNDMoNik6IDEtOS4=
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第50頁
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第51頁
fCB4IHwgeSB8IHogfCAKfC0tLXwtLS18LS0tfCAKfCBIPHN1Yj5nPC9zdWI+IHwgVyB8IEwgfCAKfCBuPHN1Yj4xPC9zdWI+IHwgbjxzdWI+Mjwvc3ViPiB8IG48c3ViPjM8L3N1Yj4gfCAKfCDlhaXlsITlhYkgfCDlj43lsITlhYkgfCDpgI/lsITlhYkgfCAKfCDlhYnnuqQgfCAgfCAgfCAKCui1hOaWmeadpea6kO+8mlhpbiBNdSBldCBhbC4g44CKRWRnZSBDb3VwbGVycyBpbiBTaWxpY29uIFBob3RvbmljIEludGVncmF0ZWQgQ2lyY3VpdHPjgIs=
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第52頁
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第53頁
fCDlubTku70gfCDlhYnpgJrkv6HlhYnlmajku7bvvIjkur/kuKrvvIkgfAp8LS0tLS0tfC0tLS0tLS0tLS0tLS0tLS0tLXwKfCAyMDIwIHwgMi44NyAgICAgICAgICAgICB8CnwgMjAyMSB8IDMuMzggICAgICAgICAgICAgfAp8IDIwMjIgfCAzLjMyICAgICAgICAgICAgIHwKfCAyMDIzIHwgMS44MSAgICAgICAgICAgICB8CnwgMjAyNCB8IDIuMDkgICAgICAgICAgICAgfAoK6LWE5paZ5p2l5rqQ77ya5YWs5Y+45YWs5ZGK77yM5Zu95L+h6K+B5Yi457uP5rWO56CU56m25omA5pW055CG
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第54頁
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
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第55頁
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第56頁
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
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第57頁
fCDlubTku70gfCDkvKDovpPnsbvvvIjkuIfmlK/vvIkgfCDmjqXlhaXlkozmlbDmja7nsbvvvIjkuIfmlK/vvIkgfAp8LS0tLS0tfC0tLS0tLS0tLS0tLS0tLS18LS0tLS0tLS0tLS0tLS0tLS0tfAp8IDIwMjIgfCAxNDcuMTUgICAgICAgICB8IDY1LjU5ICAgICAgICAgICAgfAp8IDIwMjMgfCAxNzAuMjUgICAgICAgICB8IDE2Ljk4ICAgICAgICAgICAgfAp8IDIwMjQgfCAxNTYuNjggICAgICAgICB8IDQyLjkxICAgICAgICAgICAgfAoK6LWE5paZ5p2l5rqQ77ya5YWs5Y+45YWs5ZGK77yM5Zu95L+h6K+B5Yi457uP5rWO56CU56m25omA5pW055CG
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第58頁
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第59頁
fCDlubTku70gfCDngrnlr7nngrnlhYnmqKHlnZfplIDph4/vvIjkuIflj6rvvIkgfAp8LS0tLS0tfC0tLS0tLS0tLS0tLS0tLS0tLS0tLS0tLS0tfAp8IDIwMjAgfCA2NTAgICAgICAgICAgICAgICAgICAgICAgfAp8IDIwMjEgfCA3NzkgICAgICAgICAgICAgICAgICAgICAgfAp8IDIwMjIgfCA3NTkgICAgICAgICAgICAgICAgICAgICAgfAp8IDIwMjMgfCA2MDMgICAgICAgICAgICAgICAgICAgICAgfAp8IDIwMjQgfCA4NzMgICAgICAgICAgICAgICAgICAgICAgfAoK6LWE5paZ5p2l5rqQ77ya5YWs5Y+45YWs5ZGK77yM5Zu95L+h6K+B5Yi457uP5rWO56CU56m25omA5pW055CG
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第60頁
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
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第61頁
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
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第62頁
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第63頁
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第64頁
fCBUcmFuc21pdHRlciAozrsxKSB8IFRyYW5zbWl0dGVyICjOuzIpIHwgVHJhbnNtaXR0ZXIgKM67MykgfCBUcmFuc21pdHRlciAozrs0KSB8IFRyYW5zbWl0dGVyICjOuzUpIHwKfC0tLS0tLS0tLS0tLS0tLS0tLXwtLS0tLS0tLS0tLS0tLS0tLS18LS0tLS0tLS0tLS0tLS0tLS0tfC0tLS0tLS0tLS0tLS0tLS0tLXwtLS0tLS0tLS0tLS0tLS0tLS18CnwgUmVjZWl2ZXIgKM67MSkgICAgfCBSZWNlaXZlciAozrsyKSAgICB8IFJlY2VpdmVyICjOuzMpICAgIHwgUmVjZWl2ZXIgKM67NCkgICAgfCBSZWNlaXZlciAozrs1KSAgICB8
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第65頁
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
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第66頁
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第67頁
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第68頁
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第69頁
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
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第70頁
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第71頁
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第72頁
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第73頁
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第74頁
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
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第75頁
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第76頁
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
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第77頁
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
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第78頁
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第79頁
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
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第80頁
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第81頁
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
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第82頁
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
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第83頁
fCDlubTku70gfCDmlbDmja7kuK3lv4MgfCDlhYnkvKDovpMgfCDml6Dnur/pgJrkv6EgfCDlhbbku5YgfCDmgLvorqEgfAp8LS0tLS0tfC0tLS0tLS0tfC0tLS0tLS0tfC0tLS0tLS0tfC0tLS0tLXwtLS0tLS18CnwgMjAyMiB8IDIuNTAgICB8IDguODAgICB8IDMuNzEgICB8IDAuMDAgfCAxNS4wMXwKfCAyMDIzIHwgNC4wMiAgIHwgNS45NSAgIHwgMi45NyAgIHwgMC4wMCB8IDEyLjkzfAp8IDIwMjTlubQxLTTmnIggfCAxLjc1ICAgfCAxLjc1ICAgfCAyLjgyICAgfCAwLjAwIHwgNi4zMiB8CgrotYTmlpnmnaXmupDvvJrlhazlj7jlhazlkYrvvIzlm73kv6Hor4HliLjnu4/mtY7noJTnqbbmiYDmlbTnkIY=
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第84頁
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
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第85頁
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
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第86頁
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第87頁
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
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第88頁
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
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第89頁
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
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第90頁
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第91頁
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第92頁
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第93頁
fCDosIPliLbmnLrnkIYgfCDnu5PmnoQgfCDmnZDmlpkgfCDpm4bmiJDmlrnmoYggfCDnibnngrkgfAp8IC0tLSB8IC0tLSB8IC0tLSB8IC0tLSB8IC0tLSB8Cnwg55S15ZC45pS25pWI5bqUIHwg566A5Y2V55u05rOi5a+857uT5p6EIHwgSW5QL0dlU2kgfCBHZVNpOiDplJfmnZDmlpnlpJblu7bmioDmnK8gfCDkvJjlir86IOe7k+aehOeugOWNlee0p+WHkTvliqPlir86IOa2iOWFieavlOi+g+S9jiwg57q/5oCn5bqm6L6D5beuLCDkvLTmnInovoPlpKfnmoTllb7llb7mlYjlupQgfAp8IOeUteWFieaViOW6lCB8IOmprOi1qy3mm77lvrflsJTosIPliLblmaggKE1aTSkgL+W+rueOr+iwkOaMr+WZqCAoTVJNKSB8IFNPSSB8IOazqOWFpSAo5oiW6ICX5bC9KSDovb3mtYHlrZAgfCDkvJjlir86IOWfuuS6juetieemu+WtkOiJsuaVo+aViOW6lCwg5YW85a65Q01PU+W3peiJuiwg5YW35aSH5oiQ5pys5LyY5Yq/O+WKo+WKvzog6LCD5Yi257q/5oCn5bqm6L6D5beuLCDluKblrr3mnoHpmZDovoPkvY4gfAp8IOeUteWFieaViOW6lCB8IOmprOi1qy3mm77lvrflsJTosIPliLblmaggKE1aTSkgL+W+rueOr+iwkOaMr+WZqCAoTVJNKSB8IOmUgumTjOmFuOmUgiAoTE5PSSkgfCDlvq7ovazljbDmioDmnK8gfCDkvJjlir86IOWuvemAj+aYjueql+WPo+WSjOmrmOeUteWFieezu+aVsDvliqPlir86IOaIkOacrOi+g+mrmCB8CgrotYTmlpnmnaXmupA6IOeOi+aipuafr+OAiumTjOmFuOmUguiWhOiGnOeUteWFieiwg+WItuWZqOWFs+mUrueQhuiuuuS4juaKgOacr+eglOeptuOAi1tEXS7nlLXlrZDnp5HmioDlpKflraYsMjAyNCwg5Zu95L+h6K+B5Yi457uP5rWO56CU56m25omA5pW055CG
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第94頁
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第95頁
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第96頁
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
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第97頁
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
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第98頁
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第99頁
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第100頁
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第101頁
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第102頁
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
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第103頁
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第104頁
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第105頁
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第106頁
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第107頁
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第108頁
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第109頁
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第110頁
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第111頁
硅上氮化硅波導結構的制備工藝流程(在8英寸的COMS上的Si3N4波導制造流程)_第112頁
所屬報告: 通信行業專題報告:數據中心互聯技術專題三AI變革推動硅光模塊快速發展-250513(57頁).pdf
打包全文圖表

相關數據

最新數據

客服
商務合作
小程序
服務號
折疊
午夜网日韩中文字幕,日韩Av中文字幕久久,亚洲中文字幕在线一区二区,最新中文字幕在线视频网站